Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Micromachined nanofiltration modules for lab-on-a-chip applications

Mixed motion in deterministic ratchets due to anisotropic permeability

Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

Nano particle filtration module for lap on a chips devices

Thermal hard disk drive micro actuator for improved tracking performance

Characterization of AlN thin films sputtered on Al Ti electrodes for piezoelectric devices

Influence of seed layer on crystallity and orientation of pulsed

LPCVD amorphous SiCx for freestanding electron transparent windows

Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls

Atomic layer deposition TiO2 photonic crystal waveguide of biosensors

Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide

Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias

Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application

Aluminum thermal motor for high bandwidth positioning stages

Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices

A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation

Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology

Fast response thermal linear motor with reduced power consumption.

Atomic layer deposition of TiO2 photonic crystal waveguide biosensors