Y Lamy | TU Delft Repository

YL

Y Lamy

Book chapter (1)

Conference paper (1)

Journal article (1)

3 records found

1

Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias

Conference paper (2009) - M Saadaoui (author), Henk Van Zeijl (author), H.W. Van Zeijl (author), H.W. Zeijl (author), Henk Zeijl (author), H. van Zeijl (author), H.W. van Zeijl (author), H. Zeijl (author), Henk W. Van Zeijl (author), Henk W. van Zeijl (author), H.W. Van van Zeijl (author), Henk van Van Zeijl (author), Henk van Zeijl (author), HW Van Zeijl (author), H.W. Van Van Zeijl (author), HW van Zeijl (author), H. Van Zeijl (author), HW Zeijl (author), Henk W. Zeijl (author), Henk van van Zeijl (author), H.W. Van Zeijl (author), Henk van Zeijl (author), Pasqualina Maria Sarro (author), Pasqualina M Sarro (author), P.M. Sarro (author), Lina Sarro (author), Pasqualina M. Sarro (author), P. M. Sarro (author), PM Sarro (author), HTM Pham (author), HTM Pham (author), HC MKnoops (author), WMM Kessels (author), Wilhelmus M.M. Kessels (author), MCM van de Sanden (author), F Roozeboom (author), Y Lamy (author), KB Jinesh (author), W. Besling (author)

Continuous deep reactive ion etching of tapered via holes for three-dimensional integration

Journal article (2008) - R Li (author), Y Lamy (author), WFA Besling (author), F Roozeboom (author), PM Sarro (author), Lina Sarro (author), P.M. Sarro (author), Pasqualina M. Sarro (author), Pasqualina M Sarro (author), Pasqualina Maria Sarro (author), P. M. Sarro (author)

Deep reactive ion etching in through-silicon via technology

Book chapter (2007) - F Roozeboom (author), MA Blauw (author), MA Blauw (author), Y Lamy (author), E van Grunsven (author), W Dekkers (author), JF Verhoeven (author), F van den Heuvel (author), E.W.J.M. van der Drift (author), WMM Kessels (author), Wilhelmus M.M. Kessels (author), MCM van de Sanden (author)