34 records found
1
Climate change resistant coastline by biological in-situ reinforcement of sand
Deep reactive ion etching in through-silicon via technology
Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias
Dry etching of SiC in inductively coupled Cl-2/Ar plasma
Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Modeling of fluorine-based high-density plasma etching of anisotropic silicon trenches with oxygen sidewall passivation
Processing of inertial sensors using SF6-O2 Cryogenic plasma process
IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
The etching of silicon carbide in inductively coupled SF6/O-2 plasma
Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope
Advanced time-multiplexed plasma etching of high aspect ratio silicon structures
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices
Development of deep dry etching for intelligent mocromachine devices.
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.
Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining
Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures
Balancing the etching and passivation in time-multiplexed deep dry etching of silicon.
