MB

MA Blauw

34 records found

Climate change resistant coastline by biological in-situ reinforcement of sand
Conference paper (2008) - MA Blauw (author), MA Blauw (author), MP Harkes (author), M. C.M. van Loosdrecht (author), M. C.M. Van Loosdrecht (author), M. C.M. Loosdrecht (author), M. C.M. C. M. van Loosdrecht (author), Mark van van Loosdrecht (author), Mark van Van Loosdrecht (author), Mark van Loosdrecht (author), Mark van C. M. van Loosdrecht (author), Mark C. M. van Loosdrecht (author), Mark C. M. Van Loosdrecht (author), Mark C. M. Loosdrecht (author), Mark C. M. C. M. van Loosdrecht (author), Mark C.M. van Loosdrecht (author), Mark C.M. Van Loosdrecht (author), Mark C.M. Loosdrecht (author), Mark C.M. C. M. van Loosdrecht (author), Mark C M van Loosdrecht (author), Mark C M Van Loosdrecht (author), Mark C M Loosdrecht (author), Mark C M C. M. van Loosdrecht (author), M. C M van Loosdrecht (author), M. C M Van Loosdrecht (author), M. C M Loosdrecht (author), M. C M C. M. van Loosdrecht (author), Mark van Loosdrecht (author), Mark Van Loosdrecht (author), Mark Loosdrecht (author), Mark C. M. van Loosdrecht (author), M. C M van van Loosdrecht (author), M. C M van Van Loosdrecht (author), M. C M van Loosdrecht (author), M. C M van C. M. van Loosdrecht (author), MCM van Loosdrecht (author), MCM Van Loosdrecht (author), MCM Loosdrecht (author), MCM C. M. van Loosdrecht (author), Mark C.M.van van Loosdrecht (author), Mark C.M.van Van Loosdrecht (author), Mark C.M.van Loosdrecht (author), Mark C.M.van C. M. van Loosdrecht (author), Mark M.C. van Loosdrecht (author), Mark M.C. Van Loosdrecht (author), Mark M.C. Loosdrecht (author), Mark M.C. C. M. van Loosdrecht (author), M.C.M. van Loosdrecht (author), M.C.M. Van Loosdrecht (author), M.C.M. Loosdrecht (author), M.C.M. C. M. van Loosdrecht (author), L. A. van Paassen (author), L. A. Van Paassen (author), Leon van Paassen (author), Leon Van Paassen (author), Leon A. van Paassen (author), Leon A. Van Paassen (author), L.A. van Paassen (author), L.A. Van Paassen (author), LA van Paassen (author), LA Van Paassen (author), MA Van (author), M vd Ruyt (author)

Deep reactive ion etching in through-silicon via technology

Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias

Dry etching of SiC in inductively coupled Cl-2/Ar plasma

Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Doctoral thesis (2004) - MA Blauw (author), MA Blauw (author)

IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

Modeling of fluorine-based high-density plasma etching of anisotropic silicon trenches with oxygen sidewall passivation

Processing of inertial sensors using SF6-O2 Cryogenic plasma process

The etching of silicon carbide in inductively coupled SF6/O-2 plasma

Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices
Conference paper (2002) - G Craciun (author), H Yang (author), HW Van Zeijl (author), Henk van Van Zeijl (author), H.W. van Zeijl (author), H. van Zeijl (author), HW van Zeijl (author), Henk van Zeijl (author), Henk van Zeijl (author), H. Zeijl (author), H.W. Van Zeijl (author), H.W. Zeijl (author), Henk van van Zeijl (author), Henk W. Zeijl (author), Henk W. Van Zeijl (author), H. Van Zeijl (author), H.W. Van Van Zeijl (author), HW Zeijl (author), Henk Zeijl (author), Henk W. van Zeijl (author), Henk Van Zeijl (author), H.W. Van van Zeijl (author), H.W. Van Zeijl (author), L.S. Pakula (author), MA Blauw (author), MA Blauw (author), E. W.J.M. van der Drift (author), E.W.J.M. van der Drift (author), EWJM van der Drift (author), EWJM Van Der Drift (author), E.W.J.M. Van Der Drift (author), E. W.J.M. Van Der Drift (author), Pim J. French (author), PJ French (author), P.J. French (author), Paddy J. French (author), P. J. French (author), Patrick J. French (author), Paddy French (author)

Advanced time-multiplexed plasma etching of high aspect ratio silicon structures

Temperature influence on etching deep holes with SF6/O2 cryogenic plasma

Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope

Temperature influence on etching deep holes with SF6/O2 cryogenic plasma

Balancing the etching and passivation in time-multiplexed deep dry etching of silicon.

Development of deep dry etching for intelligent mocromachine devices.

Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures

Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.

Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining

High aspect ratio cyrogenic etching of Silicon with SF6/O2 plasma.