NOV Plank | TU Delft Repository

NP

NOV Plank

Journal article (2)

2 records found

1

Dry etching of SiC in inductively coupled Cl-2/Ar plasma

Journal article (2004) - LD Jiang (author) , NOV Plank (author) , MA Blauw (author) , R Cheung (author) , EWJM van der Drift (author)

The etching of silicon carbide in inductively coupled SF6/O-2 plasma

Journal article (2003) - NOV Plank (author) , MA Blauw (author) , E.W.J.M. van der Drift (author) , R Cheung (author)