IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

Craciun, G; Yang, H; Pakula, L.S.; Blauw, MA; van der Drift, E.W.J.M.; French, P. J.

IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

Conference paper (2003)

Authors

G Craciun Electronic Instrumentation

H Yang Electronic Instrumentation

L.S. Pakula Electronic Instrumentation

MA Blauw QN/Kavli Nanolab Delft

E.W.J.M. van der Drift QN/Kavli Nanolab Delft

P. J. French Electronic Instrumentation

Research Group

Electronic Instrumentation

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Published Date

2003

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Research Group

Electronic Instrumentation

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