IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

Conference paper (2003)

Authors

G Craciun Electronic Instrumentation
H Yang Electronic Instrumentation
L.S. Pakula Electronic Instrumentation
MA Blauw QN/Kavli Nanolab Delft
E.W.J.M. van der Drift QN/Kavli Nanolab Delft
P. J. French Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2003

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation

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