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GM
G Marcos
Academic Work (1)
Journal article (1)
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Modeling of fluorine-based high-density plasma etching of anisotropic silicon trenches with oxygen sidewall passivation
Journal article (2003) -
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
G Marcos (author)
,
A Rhallabi (author)
