W. Besling | TU Delft Repository

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W. Besling

Conference paper (1)

1 records found

1

Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias

Conference paper (2009) - M Saadaoui (author), H.W. van Zeijl (author), Pasqualina M Sarro (author), HTM Pham (author), HC MKnoops (author), W. M.M. Kessels (author), MCM van de Sanden (author), F Roozeboom (author), Y Lamy (author), KB Jinesh (author), W. Besling (author)