HP

HTM Pham

77 records found

Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Micromachined nanofiltration modules for lab-on-a-chip applications

Mixed motion in deterministic ratchets due to anisotropic permeability

Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

LPCVD amorphous SiCx for freestanding electron transparent windows

Influence of seed layer on crystallity and orientation of pulsed

Thermal hard disk drive micro actuator for improved tracking performance

Nano particle filtration module for lap on a chips devices

Characterization of AlN thin films sputtered on Al Ti electrodes for piezoelectric devices

Atomic layer deposition TiO2 photonic crystal waveguide of biosensors

Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias
Conference paper (2009) - M Saadaoui (author), Henk Van Zeijl (author), H.W. Van Zeijl (author), H.W. Zeijl (author), Henk Zeijl (author), H. van Zeijl (author), H.W. van Zeijl (author), H. Zeijl (author), Henk W. Van Zeijl (author), Henk W. van Zeijl (author), H.W. Van van Zeijl (author), Henk van Van Zeijl (author), Henk van Zeijl (author), HW Van Zeijl (author), H.W. Van Van Zeijl (author), HW van Zeijl (author), H. Van Zeijl (author), HW Zeijl (author), Henk W. Zeijl (author), Henk van van Zeijl (author), H.W. Van Zeijl (author), Henk van Zeijl (author), Pasqualina Maria Sarro (author), Pasqualina M Sarro (author), P.M. Sarro (author), Lina Sarro (author), Pasqualina M. Sarro (author), P. M. Sarro (author), PM Sarro (author), HTM Pham (author), HTM Pham (author), HC MKnoops (author), WMM Kessels (author), Wilhelmus M.M. Kessels (author), MCM van de Sanden (author), F Roozeboom (author), Y Lamy (author), KB Jinesh (author), W. Besling (author)

Aluminum thermal motor for high bandwidth positioning stages

Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls

Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Fast response thermal linear motor with reduced power consumption.

Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology

Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide

Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application

A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation

Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices