Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Micromachined nanofiltration modules for lab-on-a-chip applications

Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

Mixed motion in deterministic ratchets due to anisotropic permeability

LPCVD amorphous SiCx for freestanding electron transparent windows

Influence of seed layer on crystallity and orientation of pulsed

Characterization of AlN thin films sputtered on Al Ti electrodes for piezoelectric devices

Nano particle filtration module for lap on a chips devices

Thermal hard disk drive micro actuator for improved tracking performance

Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide

Fast response thermal linear motor with reduced power consumption.

Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application

Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls

Aluminum thermal motor for high bandwidth positioning stages

Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias

Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices

Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology

A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation

Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Atomic layer deposition TiO2 photonic crystal waveguide of biosensors