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A new ammonia sensor

Conference paper (2004) - E Connolly, B Timmer, HTM Pham, Pasqualina M Sarro, W Olthuis, P.J. French

Development of post processing micromachining modules for integrated sensors and actuators applications

Report (2004) - HTM Pham, L.S. Pakula, G. Pandraud, P.J. French, Pasqualina M Sarro

Polymide sacrificial layer for an all-dry post-process surface micromachining module

Conference paper (2003) - HTM Pham, A Bagolini, C.R. de Boer, J.M.W. Laros, L.S. Pakula, P.J. French, Pasqualina M Sarro

Stiction of surface micromachined structures: a study of the problem and the possible solutions

Conference paper (2003) - HTM Pham, L.S. Pakula, P.J. French, Pasqualina M Sarro

Electromechanical optical attenuation in micromachined SiC waveguids

Conference paper (2003) - G. Pandraud, H Yang, L.S. Pakula, HTM Pham, P.J. French, Pasqualina M Sarro

Polyimide sacrificial layer for an all-dray post-process surface micromachining module

Conference paper (2003) - HTM Pham, A Bagolini, C.R. de Boer, J.M.W. Laros, L.S. Pakula, P.J. French, Pasqualina M Sarro

Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films

Journal article (2003) - HTM Pham, T Akkaya, C.R. de Boer, Pasqualina M Sarro

Fabrication of a CMOS compatibile pressure sensor for harsh environments

Conference paper (2003) - L.S. Pakula, H Yang, HTM Pham, P.J. French, Pasqualina M Sarro

Fabrication of a CMOS compatible vertical accelerometer

Conference paper (2003) - L.S. Pakula, H Yang, HTM Pham, Pasqualina M Sarro, P.J. French

Relative humidity sensors using porous SiC membranes and Al electrodes

Conference paper (2003) - E Connolly, HTM Pham, J. Groeneweg, Pasqualina M Sarro, P.J. French

In-situ doped PECVD SiC for surface micromachined devices

Conference paper (2002) - C.R. de Boer, L.S. Pakula, Pasqualina M Sarro, HTM Pham

Relative humidity sensors based on porous polysilicon and porous silicon carbide

Conference paper (2002) - E Connolly, P.J. French, HTM Pham, Pasqualina M Sarro

Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Journal article (2002) - A Bagolini, L.S. Pakula, T.L.M. Scholtes, HTM Pham, P.J. French, Pasqualina M Sarro

Pressure sensor for automotive applications

Conference paper (2002) - L.S. Pakula, H Yang, HTM Pham, P.J. French, Pasqualina M Sarro

Pressure sensor for harsh environments

Conference paper (2002) - L.S. Pakula, H Yang, HTM Pham, P.J. French, Pasqualina M Sarro

12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide

Conference paper (2002) - E Connolly, P.J. French, HTM Pham, Pasqualina M Sarro

Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

Journal article (2002) - E Connolly, GM O'Halloran, HTM Pham, Pasqualina M Sarro, P.J. French

Influence of deposition parameters and temperature on stress and strain of In Situ doped PECVD silicon carbide

Conference paper (2002) - HTM Pham, C.R. de Boer, L.S. Pakula, Pasqualina M Sarro

Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

Conference paper (2002) - HTM Pham, T Akkaya, C.R. de Boer, C.C.G. Visser, Pasqualina M Sarro

Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining.

Conference paper (2001) - HTM Pham, CR de Boer, C. Kwakernaak, W.G. Sloof, Pasqualina M Sarro

HTM Pham

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