Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Jardinier, E; Pandraud, Gregory; Pham, HTM; French, Patrick J.; Sarro, PM

Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Journal article (2009)

Authors

E Jardinier Electronic Instrumentation

Gregory Pandraud Electronic Components, Technology and Materials

HTM Pham Old - EWI Sect. ECTM

Patrick J. French Electronic Instrumentation

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Instrumentation

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Published Date

2009

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Research Group

Electronic Instrumentation

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