Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Journal article (2009)

Authors

E Jardinier Electronic Instrumentation - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
HTM Pham Old - EWI Sect. ECTM
P.J. French Electronic Instrumentation - EEMCS
Pasqualina Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation