41 records found
1
MEMS integration techniques on silicon-on-insulator for inertial devices
Below-IC post-CMOS integration of thick MEMS on a thin-SOI platform using embedded interconnects
A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range
Method of monolithically integrating MEMS/NEMS sensors/actuators with MEMS/NEMS sensors/actuators and example semiconductor process for making the same
Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
PECVD silicon carbide surface micriomachining technology and selected MEMS applications
Design and modelling of a decoupled, tunable SOI-MEMS gyroscope
A piezoresistive detector design for a high sensitivity pull in time digital accelerometer
Pull in time based acceleration sensing
Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer
Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture
A piezoresistive detector design for a high sensitivity time based digital accelerometer
Qualification of MEMS gyroscope architectures for high performance and tunability
Design and modeling of a flexible contact mode piezoresistive detector for time based acceleration sensing
Preliminary design and modeling of high performance tunable, decoupled MEMS gyroscope
Two types of silicon biomimetics MEMS gyroscopes
Wafer-level PECVD sic micropackaging technology for MEMS devices
