VR

V. Rajaraman

41 records found

Authored

A versatile CMOS compatible PECVD silicon carbide MEMS technology
Conference paper (2009) - L.S. Pakula, V. Rajaraman, P.J. French

Wafer-level PECVD sic micropackaging technology for MEMS devices
Conference paper (2009) - V. Rajaraman, P.J. French

Thin-SOI digital accelerometer employin pull-in time mode configuration
Conference paper (2008) - L.S. Pakula, V. Rajaraman, P.J. French

Silicon-on-Glass & Silicon-on-Insulator MEMS Acceleration (Inertial) Sensors - Design & Process Development
Report (2008) - V. Rajaraman

DRIE and bonding assisted low cost MEMS processing of inplane HAR inertial sensors
Conference paper (2008) - V. Rajaraman, K.A.A. Makinwa, P.J. French

Thin-film MEMS encapsulation using low-stress PECVD silicon carbide

Fabrication of accelerometers by thin-SOI micromachining
Conference paper (2008) - V. Rajaraman, L.S. Pakula, K.A.A. Makinwa, P.J. French

A thin-SOI micromachined quasi-digital accelerometer
Conference paper (2008) - L.S. Pakula, V. Rajaraman, P.J. French

Application of PECVD a-SiC thin-film layer for encapsulation of microstructures

Fabrication of accelerometers by thin-SOI micromachining
Conference paper (2008) - V. Rajaraman, L.S. Pakula, K.A.A. Makinwa, P.J. French

DRIE assisted HAR MEMS processing of inertial sensors and actuators

Design of a biologically-inspired piezoresistive strain-sensing MEMS (U_SP_2_I_IC_T)
Book chapter (2007) - DHB Wicaksono, V. Rajaraman, P.J. French

On integrated process development for SOI-MEMS inertial devices
Report (2007) - V. Rajaraman

Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope
Conference paper (2007) - Y. Chen, DHB Wicaksono, L.S. Pakula, V. Rajaraman, P.J. French

A dome-shape bio-inspired piezoresistive MEMS strain sensor

Acoustic emission based online valve leak detection and testing
Conference paper (2007) - V. Rajaraman, A puettmer

SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)

Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope (U_SP_2_I_IC_T)
Conference paper (2007) - Y. Chen, DHB Wicaksono, L.S. Pakula, V. Rajaraman, P.J. French

On the initial design and simulation of a biologically-inspired MEMS gyroscope (U_SP_2_I_IC_T)

Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)