Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer

Conference paper (2010)

Authors

V. Rajaraman Electronic Instrumentation - EEMCS
G. de Graaf Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
K.A.A. Makinwa Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation