In this research fluorescent optochemical pH probes for the detection of ischaemia have been investigated. Myocardial ischaemia is the most prominent risk during heart surgery. During open heart surgery the heart is temporarily arrested and, since there no blood flowing, oxygen supply and removal of waste products is stopped and heart cells can be damaged. In this paper we propose a novel method to monitor the condition of the heart by placing optochemical pH sensors on several strategic places around the heart during surgery. Low cost opto-chemical pH sensors, using a HPTS (8-hydroxy-1,3,6-pyrene trisulfonic acid trisodium salt) fluorescent dye encapsulated in a thin bio-compatible hydrogel layer, were investigated for this application. Our research started with an extensive optical characterization of several types of hydrogel layers at different pH levels. Secondly a reflection probe prototype using several of these layers was designed, built and tested. Dual wavelength excitation and ratiometric detection of the fluorescent signals was used to detect the pH level. Typical output signals of 35% to 53% per pH in the range from 6.5-8.0 pH have been measured and a response time of typically 400 seconds was obtained for the prototypes. Finally based on our measurements on the HPTS layers and the reflection probe we propose an improved type of pH probe for the detection of ischaemia during open heart surgery.

@en

This article describes the fabrication of MgF₂ and MgO thin-film-based optical filters and compares the optical transmission of the filters over UV. The MgF₂ thin-films were deposited by use of an e-beam technique and their optical properties were characterised by ellipsometry. The effect of substrate temperature on the optical properties was studied. The MgF₂ optimum refractive indices were obtained with a substrate temperature between 200 °C and 300 °C. Optical simulations were performed to compare the performance of MgF₂ and MgO in the fabrication of near-UV narrow bandpass optical filters. While MgO-based optical filters result in a higher transmittance peak intensity, especially at 350 nm, the MgF₂ optical filters are narrower, present lower values of FWHM, a mean value of 20 nm. This feature could be especially relevant for specific applications on fluorescent optical sensors. Finally, a Fabry-Perot based on a MgF₂/TiO₂ optical filter was deposited, using an e-beam technique for the MgF₂ thin-films and RF-sputtering technique for the TiO₂ thin-films. The MgF₂/TiO₂ optical filter peak transmittance is approximately 70% close to 400 nm, as expected. The results are discussed with focus on applications in fluorescent optical sensors for peaks at 350, 370, 380 and 400 nm, respectively.

@en

@en

The heart rate is a vital indicator of the health state of an individual. By continuously monitoring it, the fitness and health of the cardiovascular system of a user can be analyzed and impending problematic health episodes could be addressed better. Existing techniques to measure heart rate, such as electrocardiogram or photoplethysmography, are either uncomfortable for the user, or are not low-power or sensitive to motion artifacts. Infrared thermography is a non-contact technique with improved user comfort and low power consumption. In this paper, we have analyzed, built, and tested a novel system that uses infrared differential thermometry to detect the heart rate in the auricle. The sensor system was fitted into a commercial headphone since this paper is a first step into integration of the system in a Bluetooth headset. To the best of our knowledge, there has been no previous work on the detection of the heart rate signal in the ear using infrared thermometry. Positive results have been obtained after extraction of the frequency features of the bioheat transfer signal on test persons in rest.@en

The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO₂ concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO₂ sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry [1]. Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO₂ is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this approach requires the detection of very small changes in TC (0.25 ppm per ppm CO2 [3]).

@en

This paper presents a readout circuit for a carbon dioxide (COࠢ) sensor that measures the CO₂-dependent thermal time constant of a hot-wire transducer. The readout circuit periodically heats up the transducer and uses a phase-domain Δ Σ modulator to digitize the phase shift of the resulting temperature transients. A single resistive transducer is used both as a heater and as a temperature sensor, thus greatly simplifying its fabrication. To extract the transducer's resistance, and hence its temperature, in the presence of large heating currents, a pair of transducers is configured as a differentially driven bridge. The transducers and the readout circuit have been implemented in a standard 0.16μm CMOS technology, with an active area of 0.3 and 3.14 mm², respectively. The sensor consumes 6.8 mW from a 1.8-V supply, of which 6.3 mW is dissipated in the transducers. A resolution of 94-ppm CO₂ is achieved in a 1.8-s measurement time, which corresponds to an energy consumption of 12 mJ per measurement, >10x less than prior CO₂ sensors in CMOS technology.@en

Heart rate is a key factor in cardiovascular system monitoring and sports science. Some recent commercial applications use sensors in the ear but are faced with motion artifacts which corrupts the signal. Infrared thermography is a non-contact technique and may minimize motion effects with better user comfort and lower power consumption. We propose a novel system that uses infrared differential thermometry to detect the heart rate in the auricle. The signal analysis is performed using a continuous wavelet transform which extract frequency features of the bioheat transfer waveforms. Preliminary results taken from the neck provide proof of concept and similar results from the ear are expected.

@en

Measuring the ethanol/water ratio in biofuel of high ethanol content, such as E85, is important when used in a flex-fuel engine. A capacitive probe is generally used for measuring the ethanol/gasoline ratio. However, the water content in E85 biofuel cannot be disregarded or considered constant and full composition measurement of biofuel is required. Electric impedance spectroscopy with a customized coaxial probe operating in the 10 kHz to 1 MHz frequency range was investigated. An in-depth investigation of the electrical impedance domain has led to the conclusion that additional information is required to unambiguously determine the composition of the ternary biofuel mixture. Among the different options of measurement domains and techniques, optical absorption spectroscopy in the UV spectral range between 230 and 300 nm was found to be the most appropriate. The typical absorbance in the UV range is highly dominated by gasoline, while ethanol and water are almost transparent. This approach is experimentally validated using actual fuels.@en

A capacitive probe is generally used in a flex-fuel engine for measuring the ethanol content in biofuel. However, the water content in biofuel of high ethanol content cannot be disregarded or considered constant and the full composition measurement of ethanol, gasoline and water in biofuel is required. Electrical impedance spectroscopy with a customized capacitive probe operating in the 10 kHz to 1 MHz frequency range is combined with optical absorption spectroscopy in the UV spectral range between 230 and 300 nm for a full composition measurement. This approach is experimentally validated using actual fuels and the results demonstrate that electrical impedance spectroscopy when supplemented with optical impedance spectroscopy can be used to fully determine the composition of the biofuel and applied for a more effective engine management. A concept for a low-cost combined measurement system in the fuel line is presented.

@en

A generic method to reduce the in-line flow dependence of thermal conductivity detectors (TCDs) is presented. The principle is based on a dual-MEMS device configuration. Two thin-film sensors on membranes in parallel in the gas stream on the same chip are differentially operated. Both micro-TCDs are designed to be identical in terms of contact with the main gas flow, however a different depth of the detection chamber results in a different response to the thermal conductivity of the sample gas. Static and dynamic simulations have been performed to characterize the design of the fabricated structures. Devices have been fabricated in a MEMS process using a combined surface- and bulk micromachining process. The devices have been characterized statically and dynamically. Measurements on prototypes show that depending on the range of gases, device size and flow range device the effect of flow on the thermal conductivity can be reduced by a factor 4–15.@en

This paper investigates the mechanical and optical properties of thin PECVD silicon-oxide layers for optical applications. The different deposition parameters in PECVD provide a promising tool to manipulate and control the film structure. Membranes for use in optical filters typically are of ~λ/4n thickness and should be slightly tensile for remaining flat, thus avoiding scattering. The effect of the thermal budget of the process on the mechanical characteristics of the deposited films was studied. Films with compressive stress ranging from  −100 to 0 MPa were deposited. Multiple thermal annealing cycles were applied to wafers and the in situ residual stress and ex situ optical properties were measured. The residual stress in the films was found to be highly temperature dependent. Annealing during the subsequent process steps results in tensile stress from 100 to 300 MPa in sub-micron thick PECVD silicon-oxide films. However, sub-100 nm thick PECVD silicon-oxide layers exhibit a lower dependence on the thermal annealing cycles, resulting in lower stress variations in films after the annealing. It is also shown that the coefficient of thermal expansion, hence the residual stress in layers, varies with the thickness. Finally, several free-standing membranes were fabricated and the results are compared.@en

CMOS-compatible fabrication of thin dielectric membranes for the ultraviolet and visible spectrum is presented for use in airgap/SiO2-based interference filter design. A typical optical design consists of multiple membranes of 50-100 nm thickness. Maintaining flatness over a large area, as required by the optical application, is challenging. In such a free-standing membrane, the residual stress is the main force acting on the structure. Although an overall tensile residual stress can effectively stretch the membrane, too much stress would exceed the yield strength of the material and results in fracturing. Furthermore, the presence of a residual stress gradient causes the membrane to deform. In this work, the effect of a stress profile in the thin film has is investigated. Although PECVD SiO2 layers with an average tensile stress level of 178 MPa are used for the fabrication of the membranes, the presence of a stress gradient of about 0:67 MPa=nm results in a deformation in the membrane. A simple straining method is applied to reduce flatness. The preliminary results and discusses the challenges in the fabrication of stacked membranes for optical filters are presented. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.@en

The preliminary results of a study on the effect of the membrane deformation on the optical response of the distributed Bragg reflector, that is based on a stack of such membranes, are presented. The analysis is applied to airgap-based optical filters, which offer an enhanced refractive index contrast and hence are highly promising for optical MEMS devices. The available methods and materials in MEMS technology would make fabrication of such devices feasible, but the optical requirements impose strict geometrical implications on the membrane structure. Although (an overall) tensile stress in membrane is expected to result in a flat structure after the release, a stress gradient results in a deformed structure. A combined finite element and finite-difference time- domain method has been utilized in this work to study the effects of a stress gradient in a distributed Bragg reflector. The results on the effects of both a linear and a non-linear stress gradient are presented. It is shown that a non-linear stress profile results in twice the deformation and a further reduction of optical performance. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.@en

A robust and highly miniaturized optical gas sensor based on optical absorption spectroscopy is presented. By using the resonator cavity of a linear variable optical filter (LVOF) also as a gas chamber, a compact and robust optical sensor is achieved. The device operates at the 15th order in 3.2–3.4 μm wavelength range for distinguishing hydrocarbons. The physical cavity length at the μm-level is translated into an effective optical absorption path length at the mm-level by the use of highly reflective (R > 98%) Bragg mirrors. The optical design using the Fizeau interferometer approach is described. Moreover, the CMOS-compatible fabrication method is explained. In addition to the wideband and single wavelength filter characterization, absorption of methane in the LVOF cavity is demonstrated at 3392 nm and 3416.60 nm wavelengths.@en

The integration of the narrow band imaging (NBI) technique in highly miniaturized minimally invasive medical devices is presented. NBI provides a more reliable sensing performance for in vivo studies on tissues as compared to approaches based on white light illumination. NBI uses a selective filtered light with peak transmission at 415 (blue) and 540 nm (green). The blue light improves the visualization of the superficial mucosal layer, while the deeper penetration of the green light highlights the vascular patterns of the subepithelial vessels. The optical filters are based on a multilayer thin-film stack, using the Fabry-Perot configuration with titanium dioxide (TiO2) and silicon dioxide (SiO2). The blue light-emitting diode (LED) combined with the blue filter results in a maximum central wavelength at 414 nm, full-width half-maximum (FWHM) of 19 nm and maximum relative transmittance of 21%. The green LED combined with the green filter yields maximum peak intensity at 536 nm, FWHM of 30 nm, and maximum relative transmittance of 35%. RF-sputtering was used for the deposition of NBI optical filters. The refractive index and extinction coefficient of the TiO2 and SiO2 thin films were characterized and the green and blue filter designs were experimentally validated.@en

The optical absorption of water-containing bio-fuel is investigated as a parameter to determine the gasoline content of this fuel. Optical measurements reveal that gasoline shows an interesting and useful spectrum with typical absorption behavior in the UV range between 230 and 300 nm. This result indicates that significant information can be obtained to determine the gasoline concentration in bio-fuel by UV absorption spectroscopy. A concept for a low-cost measurement system in the fuel line is presented, by implementing a LVOF in combination with a wide-band light source and detector arrays.@en

The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed. @en

The increasing demand for handheld systems for absorption spectroscopy has triggered the development of microspectrometers at various wavelength ranges. Several MEMS implementations of the light source, interferometer/optical filter, and detector have already been reported in the literature. However, the size of microspectrometers is still limited by the required absorption path length in the sample gas cell. This paper presents a compact MEMS linear-variable optical filter (LVOF) where the resonator cavity of the filter is also used as a sample gas cell to measure the absorption of methane at 3392nm wavelength. The physical resonator cavity length is elongated 62.2-fold, using multiple reflections from highly reflective Bragg mirrors to achieve a sufficiently long effective optical absorption path. Although the LVOF would in principle enable operation as a robust portable microspectrometer, here it is used in a miniaturized NDIR methane sensor for wavelength selection and calibration. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.@en

A miniaturized methane (CH4) sensor based on nondispersiveinfrared absorption is realized in MEMS technology. A high level offunctional integration is achieved by using the resonance cavity of a linearvariable optical filter (LVOF) also as a gas absorption cell. For effectivedetection of methane at λ = 3.39 µm, an absorption path length of at least 5mm is required. Miniaturization therefore necessitates the use of highlyreflective mirrors and operation at the 15th-order mode with a resonatorcavity length of 25.4 µm. The conventional description of the LVOF interms of the Fabry-Perot resonator is inadequate for analyzing the opticalperformance at such demanding boundary conditions. We demonstrate thatan approach employing the Fizeau resonator is more appropriate.Furthermore, the design and fabrication in a CMOS-compatiblemicrofabrication technolog@en