PECVD silicon carbide surface micriomachining technology and selected MEMS applications

Journal article (2011)

Authors

V. Rajaraman Electronic Instrumentation
L.S. Pakula Electronic Components, Technology and Materials, Electronic Instrumentation
None Yang External organisation
Pim J. French Electronic Instrumentation
PM Sarro Electronic Components, Technology and Materials
Research Group
Electronic Instrumentation
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Published Date

2011

Language

English

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Research Group

Electronic Instrumentation

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