MEMS integration techniques on silicon-on-insulator for inertial devices

Doctoral thesis (2012)

Authors

V. Rajaraman Electronic Components, Technology and Materials - EEMCS , Electronic Instrumentation - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials