Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology

Rajaraman, V.; Sabageh, I; French, P.J.; Pandraud, G.; Cretu, E

Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology

Conference paper (2011)

Authors

V. Rajaraman Electronic Components, Technology and Materials -

I Sabageh External organisation

P.J. French Electronic Instrumentation -

G. Pandraud Electronic Components, Technology and Materials -

E Cretu External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2011

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials