Two types of silicon biomimetics MEMS gyroscopes

Cui, w; Pandraud, G.; Wicaksono, DHB; Chen, Y.; Rajaraman, V.; French, P.J.

Two types of silicon biomimetics MEMS gyroscopes

Abstract (2010)

Authors

w Cui External organisation

G. Pandraud Electronic Components, Technology and Materials -

DHB Wicaksono Electronic Instrumentation -

Y. Chen Electronic Instrumentation -

V. Rajaraman Electronic Instrumentation -

P.J. French Electronic Instrumentation -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:97df552e-b523-4b93-9ba4-6f7ebb11b642

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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials