VR

V. Rajaraman

41 records found

Below-IC post-CMOS integration of thick MEMS on a thin-SOI platform using embedded interconnects

MEMS integration techniques on silicon-on-insulator for inertial devices

A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology

PECVD silicon carbide surface micriomachining technology and selected MEMS applications

Method of monolithically integrating MEMS/NEMS sensors/actuators with MEMS/NEMS sensors/actuators and example semiconductor process for making the same
Artefact (2011) - V. Rajaraman (author)

Design and modeling of a flexible contact mode piezoresistive detector for time based acceleration sensing

Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture

Qualification of MEMS gyroscope architectures for high performance and tunability

Preliminary design and modeling of high performance tunable, decoupled MEMS gyroscope

Design and modelling of a decoupled, tunable SOI-MEMS gyroscope

Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer

Pull in time based acceleration sensing

Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture

A piezoresistive detector design for a high sensitivity time based digital accelerometer

A piezoresistive detector design for a high sensitivity pull in time digital accelerometer

Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture

Two types of silicon biomimetics MEMS gyroscopes

Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide

Wafer-level PECVD sic micropackaging technology for MEMS devices