Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture

Conference paper (2010)

Authors

I Sabageh External organisation
V. Rajaraman Electronic Instrumentation - EEMCS
E Cretu External organisation
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2010

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation