RMCM van de Sanden | TU Delft Repository

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RMCM van de Sanden

Journal article (2)

2 records found

1

The relation between the bandgap and the anisotropic nature of hydrogenated amorphous silicon

Journal article (2012) - A.H.M. Smets (author), M.A. Wank (author), B. Vet (author), M. Fischer (author), R.A.C.M.M. van Swaaij (author), M. Zeman (author), DC Bobela (author), CR Wronski (author), RMCM van de Sanden (author)

Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

Journal article (2011) - M Saadaoui (author), H van Zeijl (author), Pasqualina M Sarro (author), W.H.A. Wien (author), HTM Pham (author), C. Kwakernaak (author), HCM Knoops (author), W. M.M. Kessels (author), RMCM van de Sanden (author), FC Voogt (author), F Roozeboom (author)