FC Voogt | TU Delft Repository

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FC Voogt

Conference paper (1)

Journal article (4)

5 records found

1

Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

Journal article (2011) - M Saadaoui (author), H van Zeijl (author), Pasqualina M Sarro (author), W.H.A. Wien (author), HTM Pham (author), C. Kwakernaak (author), HCM Knoops (author), W. M.M. Kessels (author), RMCM van de Sanden (author), FC Voogt (author), F Roozeboom (author)

Melting and crystallization behavior of low-pressure chemical-vapor-deposition amorphous Si films during excimer-laser annealing

Journal article (2004) - FC Voogt (author), R. Ishihara (author), F.D. Tichelaar (author)

Heterogeneous nucleation in excimer-laser melted Si thin-films

Journal article (2001) - R. Ishihara (author), FC Voogt (author)

Advanced excimer-laser crystallization techniques of Si thin-film for location control of large grain on glass

Conference paper (2001) - R. Ishihara (author), PC van der Wilt (author), BD van Dijk (author), A Burtsev (author), FC Voogt (author), GJ Bertens (author), JW Metselaar (author), C.I.M. Beenakker (author)

A combined TEM and time-resolved optical reflectivity investigation into the excimer-laser crystallization of a-Si films

Journal article (2001) - FC Voogt (author), R. Ishihara (author)