Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Mimoun, B.A.Z.; Pham, HTM; Henneken, V; Dekker, R.

Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Journal article (2013)

Authors

B.A.Z. Mimoun Electronic Components, Technology and Materials -

HTM Pham Electronic Components, Technology and Materials -

V Henneken External organisation

R. Dekker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:58187a5e-fbd5-4866-ba78-52d4afb70baf

More Info

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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials