LPCVD amorphous SiCx for freestanding electron transparent windows

Conference paper (2010)

Authors

B Morana Electronic Components, Technology and Materials - EEMCS
JF Creemer Electronic Components, Technology and Materials - EEMCS
F Santagata Electronic Components, Technology and Materials - EEMCS
C.C Fan External organisation
HTM Pham Old - EWI Sect. ECTM
G. Pandraud Electronic Components, Technology and Materials - EEMCS
Pasqualina Maria Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials