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R
R Li
Academic Work (2)
Conference paper (1)
Journal article (1)
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2 records found
1
Fabrication of Stretchable PDMS Membrane as Substrate Material for Multi-Electrode Array Devices
Conference paper (2009) -
R Li (author)
,
A. van den Bogaard (author)
,
R. Dekker (author)
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
Journal article (2008) -
R Li (author)
,
Y Lamy (author)
,
WFA Besling (author)
,
F Roozeboom (author)
,
Pasqualina M Sarro (author)