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WFA Besling
Academic Work (2)
Journal article (2)
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2 records found
1
Fluidized-bed atomic layer deposition reactor for the synthesis of core-shell nanoparticles
Journal article (2014) -
A.P. Didden (author)
,
J. Middelkoop (author)
,
WFA Besling (author)
,
D. Nanu (author)
,
R. van de Krol (author)
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
Journal article (2008) -
R Li (author)
,
Y Lamy (author)
,
WFA Besling (author)
,
F Roozeboom (author)
,
Pasqualina M Sarro (author)