Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Electric field, Magnetic field and Magnetization: THz Time-Domain Spectroscopy Studies

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Thickness dependent terahertz emission from cobalt thin films

Investigation of terahertz emission from BiVO4/ Au thin film interface

Emission of terahertz pulses from nanostructured metal surfaces

Coherent Fourier Scatterometry

Experimental and numerical analysis of the super resolution near-field effect on an InSb sample

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Optical Characterization of laterally and vertically structured oxides and semiconductors

Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Plasmon-enhanced terahertz emission from a semiconductor/metal interface

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Application of micro solid immersion lens as probe for near-field scanning microscopy

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿

Phase information in Coherent Fourier Scatterometry

Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

Through-focus phase retrieval and its connection to the spatial correlation for propagating fields