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Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014) - J Endres, N. Kumar, P. Petrik, S Heidenreich, S.F. Pereira, Paul Urbach, B Bodermann

Plasmon-enhanced terahertz emission from a semiconductor/metal interface

Journal article (2014) - G. Ramakrishnan, N. Kumar, GKP Ramanandan, A.J.L. Adam, R.W.A. Hendrikx

Emission of terahertz pulses from nanostructured metal surfaces

Journal article (2014) - GKP Ramanandan, G. Ramakrishnan, N. Kumar, A.J.L. Adam, P.C.M. Planken

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014) - N. Kumar, P. Petrik, GKP Ramanandan, O. El Gawhary, S. Roy, S.F. Pereira, WMJ Coene, Paul Urbach

Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory

Journal article (2014) - A.P. Konijnenberg, L. Wei, N. Kumar, LCCP Filho, L. Cisotto, S.F. Pereira, Paul Urbach

Experimental and numerical analysis of the super resolution near-field effect on an InSb sample

Journal article (2014) - A. da Costa Assafrao, N. Kumar, A.J.H. Wachters, S.F. Pereira, Paul Urbach

Through-focus phase retrieval and its connection to the spatial correlation for propagating fields

Journal article (2013) - O. El Gawhary, A. Wiegmann, N. Kumar, S.F. Pereira, Paul Urbach

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Journal article (2013) - S. Roy, N. Kumar, S.F. Pereira, Paul Urbach

Phase information in Coherent Fourier Scatterometry

Journal article (2013) - N. Kumar, O. El Gawhary, S. Roy, S.F. Pereira, Paul Urbach

Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿

Conference paper (2013) - S. Roy, N. Kumar, S.F. Pereira, Paul Urbach

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2013) - N. Kumar, S. Roy, O. El Gawhary, S.F. Pereira, WMJ Coene, Paul Urbach

Terahertz Generation From BiVO4/Au Thin Film Interfaces

Poster (2013) - N. Kumar, FFA Abdi, William Smith, P.C.M. Planken, A.J.L. Adam

Enhanced terahertz emission by coherent optical absorption in ultrathin semiconductor films on metals

Journal article (2013) - G. Ramakrishnan, GKP Ramanandan, A.J.L. Adam, X Man, N. Kumar, RWA Hendrikx, P.C.M. Planken

Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

Journal article (2013) - N. Kumar, O. El Gawhary, S. Roy, Paul Urbach

Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)

Journal article (2012) - N. Kumar, O. El Gawhary, VG Kutchoukov, S.F. Pereira, W Coene, Paul Urbach

THz near-field Faraday imaging in hybrid metamaterials

Journal article (2012) - N. Kumar, AC Strikwerda, K Fan, X Zhang, RD Averitt, P.C.M. Planken, A.J.L. Adam

Terahertz emission from surface-immobilized gold nanospheres

Journal article (2012) - K Kajikawa, Y Nagai, Y Uchiho, G. Ramakrishnan, N. Kumar, GKP Ramanandan, P.C.M. Planken

Scanning effects in coherent Fourier scatterometry

Journal article (2012) - S. Roy, O. El Gawhary, N. Kumar

Surface plasmon-enhanced terahertz emission from a hemicyanine self-assembled monolayer

Journal article (2012) - G. Ramakrishnan, N. Kumar, P.C.M. Planken, D Tanaka, K Kajikawa

Performance analysis of choherent optical scatterometry

Journal article (2011) - O. El Gawhary, N. Kumar, S.F. Pereira

N. Kumar

Authored