P. Petrik | TU Delft Repository

PP

P. Petrik

Conference paper (2)

Journal article (5)

7 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author), B Fodor (author), T Lohner (author), Paul Urbach (author), B Bodermann (author), M Fried (author), E Agocs (author), P Kozma (author), J Nador (author), N. Kumar (author), J Endres (author), G Juhasz (author), C Major (author), S.F. Pereira (author)

Effect of unintentional surface layers in grating reconstruction with coherent Fourier Scatterometry.

Journal article (2015) - N. Kumar (author), P. Petrik (author), S.F. Pereira (author), Paul Urbach (author)

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015) - P. Petrik (author), N. Kumar (author), M Fried (author), B Fodor (author), G Juhasz (author), S.F. Pereira (author), S Burger (author), Paul Urbach (author)

art.nr. 15002@en

Optical characterization of gold-cuprous oxide interfaces for terahertz emission applications

Journal article (2014) - GKP Ramanandan (author), A.J.L. Adam (author), G. Ramakrishnan (author), P. Petrik (author), R.W.A. Hendrikx (author)

Optical Characterization of laterally and vertically structured oxides and semiconductors

Conference paper (2014) - P. Petrik (author), N. Kumar (author), E Agocs (author), B Fodor (author), S.F. Pereira (author), T Lohner (author), Mi Fried (author), Paul Urbach (author)

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014) - N. Kumar (author), P. Petrik (author), GKP Ramanandan (author), O. El Gawhary (author), S. Roy (author), S.F. Pereira (author), WMJ Coene (author), Paul Urbach (author)

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014) - J Endres (author), N. Kumar (author), P. Petrik (author), S Heidenreich (author), S.F. Pereira (author), Paul Urbach (author), B Bodermann (author)