P. Petrik | TU Delft Repository

PP

P. Petrik

Conference paper (2)

Journal article (5)

7 records found

1

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015) - P. Petrik (author), N. Kumar (author), M Fried (author), B Fodor (author), G Juhasz (author), S.F. Pereira (author), S Bürger (author), Paul Urbach (author)

art.nr. 15002@en

Effect of unintentional surface layers in grating reconstruction with coherent Fourier Scatterometry.

Journal article (2015) - N. Kumar (author), P. Petrik (author), S.F. Pereira (author), Paul Urbach (author)

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author), B Fodor (author), T Lohner (author), Paul Urbach (author), B Bodermann (author), M Fried (author), E Agocs (author), P Kozma (author), J Nador (author), N. Kumar (author), J Endres (author), G Juhasz (author), C Major (author), S.F. Pereira (author)

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014) - J Endres (author), N. Kumar (author), P. Petrik (author), S Heidenreich (author), S.F. Pereira (author), Paul Urbach (author), B Bodermann (author)

Optical Characterization of laterally and vertically structured oxides and semiconductors

Conference paper (2014) - P. Petrik (author), N. Kumar (author), E Agocs (author), B Fodor (author), S.F. Pereira (author), T Lohner (author), Mi Fried (author), Paul Urbach (author)

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014) - N. Kumar (author), P. Petrik (author), GKP Ramanandan (author), O. El Gawhary (author), S. Roy (author), S.F. Pereira (author), WMJ Coene (author), Paul Urbach (author)

Optical characterization of gold-cuprous oxide interfaces for terahertz emission applications

Journal article (2014) - GKP Ramanandan (author), A.J.L. Adam (author), G. Ramakrishnan (author), P. Petrik (author), R.W.A. Hendrikx (author)