WMJ Coene | TU Delft Repository

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WMJ Coene

Conference paper (2)

Journal article (2)

4 records found

1

Overlay analysis with coherent Fourier scatterometry

Journal article (2015) - N. Kumar (author), N Kumar (author), WMJ Coene (author), H. Urbach (author), Paul Paul Urbach (author), Paul Urbach (author), H.P. Paul Urbach (author), H. Paul Urbach (author), H. Paul Paul Urbach (author), Hendrik Paul Paul Urbach (author), P. Urbach (author), Hendrik Paul Urbach (author), HP Paul Urbach (author), H. P. Urbach (author), H. Paul Urbach (author), HP Urbach (author), H. P. Paul Urbach (author), H.P. Urbach (author), P. Paul Urbach (author)

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014) - N. Kumar (author), N Kumar (author), P. Petrik (author), GKP Ramanandan (author), Omar Gawhary (author), O. Gawhary (author), O. El El Gawhary (author), Omar El Gawhary (author), O. El Gawhary (author), O. El Gawhary (author), S. Roy (author), S Roy (author), Silvania Pereira (author), SF Pereira (author), Silvania F. Pereira (author), S.F. Pereira (author), S. F. Pereira (author), WMJ Coene (author), Hendrik Paul Urbach (author), H.P. Paul Urbach (author), H. P. Urbach (author), Paul Urbach (author), P. Paul Urbach (author), P. Urbach (author), H. Paul Urbach (author), Paul Paul Urbach (author), H. Urbach (author), H. Paul Urbach (author), H. Paul Paul Urbach (author), H.P. Urbach (author), HP Paul Urbach (author), Hendrik Paul Paul Urbach (author), H. P. Paul Urbach (author), HP Urbach (author)

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2014) - N Kumar (author), N. Kumar (author), S Roy (author), S. Roy (author), O. El Gawhary (author), O. El El Gawhary (author), Omar El Gawhary (author), O. El Gawhary (author), Omar Gawhary (author), O. Gawhary (author), S. F. Pereira (author), Silvania F. Pereira (author), S.F. Pereira (author), Silvania Pereira (author), SF Pereira (author), WMJ Coene (author), Hendrik Paul Paul Urbach (author), P. Paul Urbach (author), Paul Paul Urbach (author), P. Urbach (author), H.P. Paul Urbach (author), H. Paul Urbach (author), H. Paul Paul Urbach (author), HP Paul Urbach (author), H. P. Paul Urbach (author), H. Paul Urbach (author), Paul Urbach (author), H. P. Urbach (author), H. Urbach (author), H.P. Urbach (author), HP Urbach (author), Hendrik Paul Urbach (author)

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2013) - N Kumar (author), N. Kumar (author), S Roy (author), S. Roy (author), O. El Gawhary (author), O. El El Gawhary (author), Omar El Gawhary (author), O. El Gawhary (author), Omar Gawhary (author), O. Gawhary (author), S. F. Pereira (author), Silvania F. Pereira (author), S.F. Pereira (author), Silvania Pereira (author), SF Pereira (author), WMJ Coene (author), Hendrik Paul Paul Urbach (author), P. Paul Urbach (author), Paul Paul Urbach (author), P. Urbach (author), H.P. Paul Urbach (author), H. Paul Urbach (author), H. Paul Paul Urbach (author), HP Paul Urbach (author), H. P. Paul Urbach (author), H. Paul Urbach (author), Paul Urbach (author), H. P. Urbach (author), H. Urbach (author), H.P. Urbach (author), HP Urbach (author), Hendrik Paul Urbach (author)