WMJ Coene | TU Delft Repository

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WMJ Coene

Conference paper (2)

Journal article (2)

4 records found

1

Overlay analysis with coherent Fourier scatterometry

Journal article (2015) - N. Kumar (author), WMJ Coene (author), Paul Urbach (author)

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2014) - N. Kumar (author), S. Roy (author), O. El Gawhary (author), S.F. Pereira (author), WMJ Coene (author), Paul Urbach (author)

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014) - N. Kumar (author), P. Petrik (author), GKP Ramanandan (author), O. El Gawhary (author), S. Roy (author), S.F. Pereira (author), WMJ Coene (author), Paul Urbach (author)

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2013) - N. Kumar (author), S. Roy (author), O. El Gawhary (author), S.F. Pereira (author), WMJ Coene (author), Paul Urbach (author)