SP
S.F. Pereira
188 records found
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In power electronics, compound semiconductors with large bandgaps, like silicon carbide (SiC), are increasingly being used as material instead of silicon. They have a lot of advantages over silicon but are also intolerant of nanoscale material defects, so that a defect inspection
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We propose a technique which exploits entanglement to enhance quantitative phase retrieval of an object in a non-interferometric setting only measuring the propagated intensity pattern after interaction with the object.@en
The significance of precise metrology in various industries, particularly within manufacturing plants, is undeniable, especially as components and devices continue to undergo miniaturization. The emergence of nano-manufacturing further amplifies the necessity for meticulous measu
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We show a general method to estimate with optimum precision, i.e., the best precision determined by the light-matter interaction process, a set of parameters that characterize a phase object. The method is derived from ideas presented by Pezze et al. [Phys. Rev. Lett. 119, 130504
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Achieving high degree of tunability in photonic devices has been a focal point in the field of integrated photonics for several decades, enabling a wide range of applications from telecommunication and biochemical sensing to fundamental quantum photonic experiments. We introduce
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Inspection of surface and nanostructure imperfections play an important role in high-throughput manufacturing across various industries. This paper introduces a novel, parallelised version of the metrology and inspection technique: Coherent Fourier scatterometry (CFS). The propos
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We exploit quantum correlations to enhance quantitative phase retrieval of an object in a non-interferometric setting, only measuring the propagated intensity pattern after interaction with the object.@en
Nanostructures with steep side wall angles (swa) play a pivotal role in various technological applications. Accurate characterization of these nanostructures is crucial for optimizing their performance. In this study, we propose a far-field detection method based on coherent Four
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It has been a widely growing interest in using silicon carbide (SiC) in high-power electronic devices. Yet, SiC wafers may contain killer defects that could reduce fabrication yield and make the device fall into unexpected failures. To prevent these failures from happening, it is
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Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the st
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Coating layer on samples with roughness
Numerical study for coherent Fourier scatterometry
For the development of integrated circuits, the accompanying metrology inside the fabrication process is essential. Non-imaging metrology of nanostructure has to be quick and non-destructive. The multilayers are crucial components of today's microprocessor nanostructures and refl
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Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre–Gaussian modes are characterized by a phase factor eilθ, and contain a phase singularity in the m
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Quantum entanglement and squeezing have significantly improved phase estimation and imaging in interferometric settings beyond the classical limits. However, for a wide class of non-interferometric phase imaging/retrieval methods vastly used in the classical domain, e.g., ptychog
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Coherent Fourier scatterometry
A holistic tool for inspection of isolated particles or defects on gratings
Detecting defects on diffraction gratings is crucial for ensuring their performance and reliability. Practical detection of these defects poses challenges due to their subtle nature.We performnumerical investigations and demonstrate experimentally the capability of coherent Fouri
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Shortly after their inception, superconducting nanowire single-photon detectors (SNSPDs) became the leading quantum light detection technology. With the capability of detecting single-photons with near-unity efficiency, high time resolution, low dark count rate, and fast recovery
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Accurate determination of the physical parameters of nanostructures from optical far-field scattering is an important and challenging topic in the semiconductor industry. Here, we propose a novel metrology method to determine simultaneously the height and side-wall angle of a ste
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In recent years, a lot of works have been published that use parameter retrieval using orbital angular momentum (OAM) beams. Most make use of the OAM of different Laguerre-Gauss modes. However, those specific optical beams are paraxial beams and this limits the regime in which th
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We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operat
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Single photon detectors are indispensable tools in optics, from fundamental measurements to quantum information processing. The ability of superconducting nanowire single photon detectors (SNSPDs) to detect single photons with unprecedented efficiency, short dead time, and high t
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The sidewall angle (SWA) of a nanostructure exerts influence on the performance of the nanostructure and plays an important role in processing nano-structural chips. It is still a great challenge to determine steep SWAs from far field measurements especially when the SWAs are clo
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