We exploit quantum correlations to enhance quantitative phase retrieval of an object in a non-interferometric setting, only measuring the propagated intensity pattern after interaction with the object.

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Inspection of surface and nanostructure imperfections play an important role in high-throughput manufacturing across various industries. This paper introduces a novel, parallelised version of the metrology and inspection technique: Coherent Fourier scatterometry (CFS). The proposed strategy employs parallelisation with multiple probes, facilitated by a diffraction grating generating multiple optical beams and detection using an array of split detectors. The article details the optical setup, design considerations, and presents results, including independent detection verification, calibration curves for different beams, and a data stitching process for composite scans. The study concludes with discussions on the system's limitations and potential avenues for future development, emphasizing the significance of enhancing scanning speed for the widespread adoption of CFS as a commercial metrology tool.@en

The significance of precise metrology in various industries, particularly within manufacturing plants, is undeniable, especially as components and devices continue to undergo miniaturization. The emergence of nano-manufacturing further amplifies the necessity for meticulous measurement techniques. Coherent Fourier scatterometry (CFS) is a nonimaging, model-based, bright-field optical metrology and inspection technique used for retrieving complex geometric parameters of nanostructures and for detecting isolated nanoparticles and contamination on surfaces. It uses a focused light spot to illuminate the sample and the scattered light is collected as the sample is scanned in the lateral direction. However, the time it takes to inspect a certain area has been a limiting factor in its wider adoption as a commercial metrology tool. To address this limitation, we propose a novel design of CFS utilizing a galvo mirror for faster scanning of the laser spot on the sample, offering significant improvements in scan speed.@en

We propose a technique which exploits entanglement to enhance quantitative phase retrieval of an object in a non-interferometric setting only measuring the propagated intensity pattern after interaction with the object.@en

Quantum entanglement and squeezing have significantly improved phase estimation and imaging in interferometric settings beyond the classical limits. However, for a wide class of non-interferometric phase imaging/retrieval methods vastly used in the classical domain, e.g., ptychography and diffractive imaging, a demonstration of quantum advantage is still missing. Here, we fill this gap by exploiting entanglement to enhance imaging of a pure phase object in a non-interferometric setting, only measuring the phase effect on the free-propagating field. This method, based on the so-called “transport of intensity equation", is quantitative since it provides the absolute value of the phase without prior knowledge of the object and operates in wide-field mode, so it does not need time-consuming raster scanning. Moreover, it does not require spatial and temporal coherence of the incident light. Besides a general improvement of the image quality at a fixed number of photons irradiated through the object, resulting in better discrimination of small details, we demonstrate a clear reduction of the uncertainty in the quantitative phase estimation. Although we provide an experimental demonstration of a specific scheme in the visible spectrum, this research also paves the way for applications at different wavelengths, e.g., X-ray imaging, where reducing the photon dose is of utmost importance.

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In recent years, a lot of works have been published that use parameter retrieval using orbital angular momentum (OAM) beams. Most make use of the OAM of different Laguerre-Gauss modes. However, those specific optical beams are paraxial beams and this limits the regime in which they can be used. In this paper, we report on the first results on retrieving the geometric parameters of a diffraction grating by analysing the corresponding complex-valued (i.e. amplitude and phase) Helmholtz Natural Modes (HNM) spectra containing both the azimuthal (i.e. n) and radial (i.e. m) indices. HNMs are a set of orthogonal, non-paraxial beams with finite energy carrying OAM. We use the coherent Fourier scatterometry (CFS) setup to calculate the field scattered from the diffraction grating. The amplitude and phase contributions of each HNM are then obtained by numerically calculating the overlap integral of the scattered field with the different modes. We show results on the sensitivity of the HNMs to several grating parameters.

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