Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014)

Authors

N. Kumar ImPhys/Optics - AS
P. Petrik ImPhys/Optics - AS
GKP Ramanandan External organisation
O. El Gawhary ImPhys/Optics - AS
S. Roy ImPhys/Optics - AS
S.F. Pereira ImPhys/Optics - AS
WMJ Coene External organisation
Paul Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics