Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2014)

Authors

N. Kumar ImPhys/Optics
S. Roy ImPhys/Optics
O Gawhary ImPhys/Optics
S. F. Pereira ImPhys/Optics
WMJ Coene External organisation
HP Urbach ImPhys/Optics
Research Group
ImPhys/Optics
More Info
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Published Date

2014

Language

English

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Research Group

ImPhys/Optics

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