Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014)

Authors

J Endres External organisation
N. Kumar ImPhys/Optics - AS
P. Petrik ImPhys/Optics - AS
S Heidenreich External organisation
S.F. Pereira ImPhys/Optics - AS
Paul Urbach ImPhys/Optics - AS
B Bodermann External organisation
Research Group
ImPhys/Optics (AS) (TU Delft)
More Info
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics