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BB
B Bodermann
2 records found
1
Authored
Methods for optical modeling and cross-checking in ellipsometry and scatterometry
Conference paper (2015) -
P. Petrik
,
B Fodor
,
T Lohner
,
Paul Urbach
,
B Bodermann
,
M Fried
,
E Agocs
,
P Kozma
,
J Nador
,
N. Kumar
,
J Endres
,
G Juhasz
,
C Major
,
S.F. Pereira
Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.
Journal article (2014) -
J Endres
,
N. Kumar
,
P. Petrik
,
S Heidenreich
,
S.F. Pereira
,
Paul Urbach
,
B Bodermann
