B Bodermann | TU Delft Repository

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B Bodermann

Conference paper (1)

Journal article (1)

2 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author), B Fodor (author), T Lohner (author), H. Paul Urbach (author), B Bodermann (author), M Fried (author), E Agocs (author), P Kozma (author), J Nador (author), N. Kumar (author), J Endres (author), G Juhasz (author), C Major (author), S. F. Pereira (author)

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014) - J Endres (author), N Kumar (author), P. Petrik (author), S Heidenreich (author), S. F. Pereira (author), H. P. Paul Urbach (author), B Bodermann (author)