T Lohner | TU Delft Repository

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T Lohner

Conference paper (2)

2 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author), B Fodor (author), T Lohner (author), Paul Urbach (author), B Bodermann (author), M Fried (author), E Agocs (author), P Kozma (author), J Nador (author), N. Kumar (author), J Endres (author), G Juhasz (author), C Major (author), S.F. Pereira (author)

Optical Characterization of laterally and vertically structured oxides and semiconductors

Conference paper (2014) - P. Petrik (author), N. Kumar (author), E Agocs (author), B Fodor (author), S.F. Pereira (author), T Lohner (author), Mi Fried (author), Paul Urbach (author)