G Juhasz | TU Delft Repository

GJ

G Juhasz

Conference paper (1)

Journal article (1)

2 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author), B Fodor (author), T Lohner (author), H. Paul Urbach (author), Hendrik Paul Urbach (author), H. P. Paul Urbach (author), P. Paul Urbach (author), H.P. Urbach (author), Paul Urbach (author), Hendrik Paul Paul Urbach (author), H. Paul Urbach (author), H. Urbach (author), P. Urbach (author), Paul Paul Urbach (author), HP Urbach (author), H. P. Urbach (author), H. Paul Paul Urbach (author), H.P. Paul Urbach (author), HP Paul Urbach (author), B Bodermann (author), M Fried (author), E Agocs (author), P Kozma (author), J Nador (author), N. Kumar (author), N Kumar (author), J Endres (author), G Juhasz (author), C Major (author), S. F. Pereira (author), Silvania Pereira (author), SF Pereira (author), S.F. Pereira (author), Silvania F. Pereira (author)

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015) - P. Petrik (author), N Kumar (author), N. Kumar (author), M Fried (author), B Fodor (author), G Juhasz (author), S.F. Pereira (author), Silvania Pereira (author), SF Pereira (author), Silvania F. Pereira (author), S. F. Pereira (author), S Burger (author), H.P. Urbach (author), Hendrik Paul Urbach (author), H.P. Paul Urbach (author), Paul Urbach (author), H. Paul Paul Urbach (author), H. P. Urbach (author), H. P. Paul Urbach (author), Paul Paul Urbach (author), HP Urbach (author), Hendrik Paul Paul Urbach (author), H. Paul Urbach (author), HP Paul Urbach (author), P. Urbach (author), P. Paul Urbach (author), H. Urbach (author), H. Paul Urbach (author)

art.nr. 15002@en