M Fried | TU Delft Repository

MF

M Fried

Conference paper (1)

Journal article (1)

2 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author), B Fodor (author), T Lohner (author), Paul Urbach (author), B Bodermann (author), M Fried (author), E Agocs (author), P Kozma (author), J Nador (author), N. Kumar (author), J Endres (author), G Juhasz (author), C Major (author), S.F. Pereira (author)

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015) - P. Petrik (author), N. Kumar (author), M Fried (author), B Fodor (author), G Juhasz (author), S.F. Pereira (author), S Bürger (author), Paul Urbach (author)

art.nr. 15002@en