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C Major
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Conference paper (1)
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Methods for optical modeling and cross-checking in ellipsometry and scatterometry
Conference paper (2015) -
P. Petrik (author)
,
B Fodor (author)
,
T Lohner (author)
,
Paul Urbach (author)
,
B Bodermann (author)
,
M Fried (author)
,
E Agocs (author)
,
P Kozma (author)
,
J Nador (author)
,
N. Kumar (author)
,
J Endres (author)
,
G Juhasz (author)
,
C Major (author)
,
S.F. Pereira (author)