Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Journal article (2013)

Authors

S. Roy ImPhys/Optics - AS
N. Kumar ImPhys/Optics - AS
S.F. Pereira ImPhys/Optics - AS
Paul Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
Copyright: © 2013 S. Roy, N. Kumar, S.F. Pereira, Paul Urbach
DOI: https://doi.org/10.1088/2040-8978/15/7/075707
More Info
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Published Date

2013

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

Files

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- Embargo expired in 04-12-2013