Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Journal article (2013)
Research Group
ImPhys/Optics (AS) (TU Delft)
Copyright: © 2013 S. Roy, N. Kumar, S.F. Pereira, Paul Urbach
DOI: https://doi.org/10.1088/2040-8978/15/7/075707
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Published Date

2013

Language

English

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

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