Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

Kumar, N; Gawhary, O; Roy, S; Urbach, H. Paul

Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

Journal article (2013)

Authors

N Kumar ImPhys/Optics

O Gawhary ImPhys/Optics

S Roy ImPhys/Optics

H. Paul Urbach ImPhys/Optics

Research Group

ImPhys/Optics

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http://resolver.tudelft.nl/uuid:07baf216-464b-4784-9ed6-a7f6da4473c4

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Published Date

2013

Language

English

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Research Group

ImPhys/Optics

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