SM

S. Milosavljevic

29 records found

Authored

Deep p+ junctions formed by drive-in from pure boron depositions

Characterization of amorphous boron layers as diffusion barrier for pure aluminium

Pure boron chemical vapor deposited layers; A new material for silicon device processing

Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

Integration of Laser-Annealed Junctions in a Low-Temperature High-k Metal-Gate MISFET

Improved RF devices for future adaptive wireless systems using two-sided contacting and AIN cooling

Special RF/microwave devices in silicon-on-glass technology

Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology

RF/microwave device fabrication in silicon-on-glass technology

Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

Ring-gate MOSFET test structures for measuring surface-charge-layer sheet resistance on high-resistivity-silicon substrates
Conference paper (2006) - SB Ir. Evseev, L.K. Nanver, S. Milosavljevic

Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

Silicon-on-glass technology for RF and microwave device fabrication

Application of spacer hard-masks for sub-100 nm wide silicon fin-etching
Conference paper (2006) - V. Jovanovic, S. Milosavljevic, L.K. Nanver, T Suligoj

Electrical characterization of silicon nitride and silicon carbide CVD layers as passivation on high resistivity silicon substrates

PVD aluminium nitride as heat-spreader in IC technology

PACD process development

Micro injector fabrication process for a portable gas chromatograph
Report (2001) - S. Milosavljevic, J.M.W. Laros

The fabrication of a focal plane infrared silicon detection

The Mierij wind sensor fabrication
Report (2001) - S. Milosavljevic