Silicon-on-glass technology for RF and microwave device fabrication

Nanver, L.K.; Schellevis, H.; Huang, C.; Milosavljevic, S.; Goudena, E.J.G.; Scholtes, T.L.M.; La Spina, L.; Lorito, G.; Sarubbi, F; Gonda, V; Popadi¿, M; Buisman, K.; de Vreede, LCN

Silicon-on-glass technology for RF and microwave device fabrication

Conference paper (2006)

Authors

L.K. Nanver Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

C. Huang Old - EWI Ch. Integrated Sensing Devices

S. Milosavljevic Electronic Components, Technology and Materials -

E.J.G. Goudena Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

L. La Spina Electronic Components, Technology and Materials -

G. Lorito Old - EWI Sect. ECTM

F Sarubbi Electronic Components, Technology and Materials -

V Gonda Electronic Components, Technology and Materials -

M Popadi¿ External organisation

K. Buisman Old - EWI Ch. Integrated Sensing Devices

LCN de Vreede External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2006

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials