High-efficiency silicon photodiode detector for sub-keV electron microscopy

Boron-layer silicon photodiodes for high-efficiency low-energy electron detection

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Ultrashallow junction silicon photodiodes for detection of low energy electrons

New solid state detector design for ultra sensitive back scattered electron detection

Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

Silicon photodiodes for high-efficiency low-energy electron detection