High-efficiency silicon photodiode detector for sub-keV electron microscopy

Boron-layer silicon photodiodes for high-efficiency low-energy electron detection

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Silicon photodiodes for high-efficiency low-energy electron detection

Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

Ultrashallow junction silicon photodiodes for detection of low energy electrons

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