Integration of Laser-Annealed Junctions in a Low-Temperature High-k Metal-Gate MISFET

Biasotto, C; Jovanovic, V.; Gonda, V; van der Cingel, J.; Milosavljevic, S.; Nanver, L.K.

Integration of Laser-Annealed Junctions in a Low-Temperature High-k Metal-Gate MISFET

Conference paper (2009)

Authors

C Biasotto Electronic Components, Technology and Materials -

V. Jovanovic Electronic Components, Technology and Materials -

V Gonda Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

S. Milosavljevic Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials