Pure boron chemical vapor deposited layers; A new material for silicon device processing

Conference paper (2010)

Authors

LK Nanver Electronic Components, Technology and Materials
T.L.M. Scholtes Electronic Components, Technology and Materials
F Sarubbi Electronic Components, Technology and Materials
Wiebe de Boer Electronic Components, Technology and Materials
G. Lorito Electronic Components, Technology and Materials
A. Sakic Electronic Components, Technology and Materials
S. Milosavljević Electronic Components, Technology and Materials
C. Mok Kai Rine Electronic Components, Technology and Materials
Lei Shi Electronic Instrumentation
Stoyan Nihtianova Electronic Instrumentation
K. Buisman Old - EWI Sect. Electronics
Research Group
Electronic Components, Technology and Materials
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Published Date

2010

Language

English

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Research Group

Electronic Components, Technology and Materials

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