9 records found
1
PureB single-photon avalanche diodes for low-energy electron detection down to 200 eV
Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces
Fabrication of low dark-count PureB single-photon avalanche diodes
UV-sensitive low dark-count PureB single-photon avalanche diode
Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility
VUV/low-energy electron Si photodiodes with postmetal 400°C PureB deposition
Effects of annealing on chemical-vapor deposited PureB layers
Pure boron chemical vapor deposited layers; A new material for silicon device processing