Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces

Mohammadi, V.; Golshani, N.; Mok Kai Rine, C.; de Boer, W.B.; Derakhshandeh Kheljani, J.; Nanver, LK

Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces

Journal article (2014)

Authors

V. Mohammadi Electronic Components, Technology and Materials

N. Golshani Electronic Components, Technology and Materials

C. Mok Kai Rine Electronic Components, Technology and Materials

W.B. de Boer Old - EWI Sect. ECTM

J. Derakhshandeh Kheljani Electronic Components, Technology and Materials

LK Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2014

Language

English

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Research Group

Electronic Components, Technology and Materials