Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

Nanver, LK; Qi, L.; Mohammadi, V.; Mok Kai Rine, C.; de Boer, W.B.; Golshani, N.; Sammak, A.; Scholtes, T.L.M.; Gottwald, A; Kroth, U; Scholze, F

Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

Journal article (2014)

Authors

LK Nanver Electronic Components, Technology and Materials

L. Qi Electronic Components, Technology and Materials

V. Mohammadi Electronic Components, Technology and Materials

C. Mok Kai Rine Electronic Components, Technology and Materials

W.B. de Boer Old - EWI Sect. ECTM

N. Golshani Electronic Components, Technology and Materials

A. Sammak Electronic Components, Technology and Materials

T.L.M. Scholtes Electronic Components, Technology and Materials

A Gottwald External organisation

U Kroth External organisation

F Scholze External organisation

Research Group

Electronic Components, Technology and Materials

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Published Date

2014

Language

English

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Research Group

Electronic Components, Technology and Materials

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