FS

F Scholze

12 records found

Authored

Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment
Journal article (2013) - L. Shi, S. Nihtianova, L.K. Nanver, F Scholze

Surface-charge-collection-enhanced high-sensitivity high-stability silicon photodiodes for DUV and VUV spectral ranges

Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes

Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application
Conference paper (2012) - L. Shi, S. Nihtianova, F Scholze, L.K. Nanver

Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency
Conference paper (2011) - L. Shi, L.K. Nanver, C Laubis, F Scholze, S. Nihtianova

High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

high performance silicon based extreme ultraviolet radiation detector for industrial application

Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes
Conference paper (2009) - L. Shi, F Sarubbi, S. Nihtianova, L.K. Nanver, F Scholze

Characterization of new EUV stable silicon photodiodes

High-performance DUV/EUV photodiodes in a pure boron doping technology

Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography